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AXCELIS TECHNOLOGIES INC

SD 13 filings

All SD Filings

Complete history of SD filings with the SEC

Date Filed View on EDGAR
27 May
May 27, 2026
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06 May
May 06, 2025
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17 May
May 17, 2024
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18 May
May 18, 2023
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20 May
May 20, 2022
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18 May
May 18, 2021
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22 May
May 22, 2020
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22 May
May 22, 2019
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24 May
May 24, 2018
open_in_new View Filing
24 May
May 24, 2017
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27 May
May 27, 2016
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22 May
May 22, 2015
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28 May
May 28, 2014
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