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AXCELIS TECHNOLOGIES INC
SD
13 filings
All SD Filings
Complete history of SD filings with the SEC
| Date Filed | View on EDGAR |
|---|---|
|
27
May
May 27, 2026
|
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06
May
May 06, 2025
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17
May
May 17, 2024
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18
May
May 18, 2023
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20
May
May 20, 2022
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18
May
May 18, 2021
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22
May
May 22, 2020
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22
May
May 22, 2019
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24
May
May 24, 2018
|
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24
May
May 24, 2017
|
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27
May
May 27, 2016
|
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22
May
May 22, 2015
|
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28
May
May 28, 2014
|
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