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AXCELIS TECHNOLOGIES INC

SCHEDULE 13G 7 filings

All SCHEDULE 13G Filings

Complete history of SCHEDULE 13G filings with the SEC

Date Filed View on EDGAR
06 May
May 06, 2026
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29 Apr
Apr 29, 2026
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29 Apr
Apr 29, 2026
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28 Apr
Apr 28, 2026
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28 Apr
Apr 28, 2026
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12 Feb
Feb 12, 2026
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14 Aug
Aug 14, 2025
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