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AXCELIS TECHNOLOGIES INC

SC 13G 35 filings

All SC 13G Filings

Complete history of SC 13G filings with the SEC

Date Filed	View on EDGAR
27 Oct Oct 27, 2022	open_in_new View Filing
13 Feb Feb 13, 2018	open_in_new View Filing
08 Feb Feb 08, 2018	open_in_new View Filing
10 Jan Jan 10, 2018	open_in_new View Filing
09 Feb Feb 09, 2017	open_in_new View Filing
09 Feb Feb 09, 2017	open_in_new View Filing
10 Feb Feb 10, 2016	open_in_new View Filing
30 Jun Jun 30, 2015	open_in_new View Filing
03 Feb Feb 03, 2015	open_in_new View Filing
07 May May 07, 2014	open_in_new View Filing
07 Feb Feb 07, 2014	open_in_new View Filing
13 Feb Feb 13, 2013	open_in_new View Filing
13 Feb Feb 13, 2012	open_in_new View Filing
11 Feb Feb 11, 2011	open_in_new View Filing
02 Feb Feb 02, 2011	open_in_new View Filing
12 Feb Feb 12, 2010	open_in_new View Filing
11 Feb Feb 11, 2010	open_in_new View Filing
25 Feb Feb 25, 2009	open_in_new View Filing
11 Feb Feb 11, 2009	open_in_new View Filing
05 Feb Feb 05, 2009	open_in_new View Filing
29 Aug Aug 29, 2008	open_in_new View Filing
08 Feb Feb 08, 2008	open_in_new View Filing
05 Feb Feb 05, 2008	open_in_new View Filing
09 Nov Nov 09, 2007	open_in_new View Filing
13 Feb Feb 13, 2007	open_in_new View Filing
02 Feb Feb 02, 2007	open_in_new View Filing
23 Jan Jan 23, 2007	open_in_new View Filing
27 Jan Jan 27, 2006	open_in_new View Filing
16 Feb Feb 16, 2005	open_in_new View Filing
10 Dec Dec 10, 2004	open_in_new View Filing
17 Feb Feb 17, 2004	open_in_new View Filing
04 Feb Feb 04, 2003	open_in_new View Filing
13 Feb Feb 13, 2002	open_in_new View Filing
12 Feb Feb 12, 2002	open_in_new View Filing
09 Feb Feb 09, 2001	open_in_new View Filing