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AXCELIS TECHNOLOGIES INC

DEF 14A 26 filings

All DEF 14A Filings

Complete history of DEF 14A filings with the SEC

Date Filed	View on EDGAR
31 Mar Mar 31, 2026	open_in_new View Filing
31 Mar Mar 31, 2025	open_in_new View Filing
29 Mar Mar 29, 2024	open_in_new View Filing
31 Mar Mar 31, 2023	open_in_new View Filing
30 Mar Mar 30, 2022	open_in_new View Filing
25 Mar Mar 25, 2021	open_in_new View Filing
30 Mar Mar 30, 2020	open_in_new View Filing
27 Mar Mar 27, 2019	open_in_new View Filing
27 Mar Mar 27, 2018	open_in_new View Filing
29 Mar Mar 29, 2017	open_in_new View Filing
14 Mar Mar 14, 2016	open_in_new View Filing
25 Mar Mar 25, 2015	open_in_new View Filing
25 Mar Mar 25, 2014	open_in_new View Filing
26 Mar Mar 26, 2013	open_in_new View Filing
23 Mar Mar 23, 2012	open_in_new View Filing
24 Mar Mar 24, 2011	open_in_new View Filing
23 Mar Mar 23, 2010	open_in_new View Filing
02 Apr Apr 02, 2009	open_in_new View Filing
27 Mar Mar 27, 2008	open_in_new View Filing
30 Mar Mar 30, 2007	open_in_new View Filing
31 Mar Mar 31, 2006	open_in_new View Filing
01 Apr Apr 01, 2005	open_in_new View Filing
18 Mar Mar 18, 2004	open_in_new View Filing
01 May May 01, 2003	open_in_new View Filing
20 Mar Mar 20, 2002	open_in_new View Filing
30 Apr Apr 30, 2001	open_in_new View Filing