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AXCELIS TECHNOLOGIES INC
ARS
18 filings
All ARS Filings
Complete history of ARS filings with the SEC
| Date Filed | View on EDGAR |
|---|---|
|
31
Mar
Mar 31, 2026
|
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31
Mar
Mar 31, 2025
|
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|
29
Mar
Mar 29, 2024
|
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|
31
Mar
Mar 31, 2023
|
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|
25
Mar
Mar 25, 2015
|
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|
09
Apr
Apr 09, 2014
|
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|
04
Apr
Apr 04, 2013
|
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|
26
Mar
Mar 26, 2012
|
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|
30
Mar
Mar 30, 2011
|
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25
Mar
Mar 25, 2010
|
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|
07
Apr
Apr 07, 2009
|
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31
Mar
Mar 31, 2008
|
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|
02
Apr
Apr 02, 2007
|
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|
03
Apr
Apr 03, 2006
|
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|
04
Apr
Apr 04, 2005
|
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|
17
Mar
Mar 17, 2004
|
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|
01
May
May 01, 2003
|
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|
20
Mar
Mar 20, 2002
|
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