SEC Filings

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AXCELIS TECHNOLOGIES INC

3 38 filings

All 3 Filings

Complete history of 3 filings with the SEC

Date Filed	View on EDGAR
25 Mar Mar 25, 2026	open_in_new View Filing
24 Mar Mar 24, 2026	open_in_new View Filing
22 Dec Dec 22, 2025	open_in_new View Filing
12 Dec Dec 12, 2024	open_in_new View Filing
28 Feb Feb 28, 2024	open_in_new View Filing
28 Feb Feb 28, 2024	open_in_new View Filing
29 Sep Sep 29, 2023	open_in_new View Filing
01 Sep Sep 01, 2023	open_in_new View Filing
12 Jun Jun 12, 2023	open_in_new View Filing
06 Sep Sep 06, 2022	open_in_new View Filing
23 Feb Feb 23, 2022	open_in_new View Filing
23 Feb Feb 23, 2022	open_in_new View Filing
15 Aug Aug 15, 2019	open_in_new View Filing
16 May May 16, 2018	open_in_new View Filing
15 Nov Nov 15, 2016	open_in_new View Filing
13 May May 13, 2015	open_in_new View Filing
13 May May 13, 2015	open_in_new View Filing
13 May May 13, 2015	open_in_new View Filing
14 May May 14, 2014	open_in_new View Filing
14 May May 14, 2014	open_in_new View Filing
14 Nov Nov 14, 2013	open_in_new View Filing
13 Feb Feb 13, 2013	open_in_new View Filing
04 Aug Aug 04, 2011	open_in_new View Filing
03 Feb Feb 03, 2011	open_in_new View Filing
18 Jan Jan 18, 2011	open_in_new View Filing
17 Sep Sep 17, 2007	open_in_new View Filing
09 Nov Nov 09, 2006	open_in_new View Filing
03 Feb Feb 03, 2006	open_in_new View Filing
08 Aug Aug 08, 2005	open_in_new View Filing
24 May May 24, 2005	open_in_new View Filing
19 May May 19, 2005	open_in_new View Filing
19 May May 19, 2005	open_in_new View Filing
19 Jan Jan 19, 2005	open_in_new View Filing
19 Jan Jan 19, 2005	open_in_new View Filing
19 Jan Jan 19, 2005	open_in_new View Filing
24 Oct Oct 24, 2003	open_in_new View Filing
01 Jul Jul 01, 2003	open_in_new View Filing
14 Feb Feb 14, 2003	open_in_new View Filing